The ECE Department Cleanroom facility is used to develop novel microelectronic materials, processes, and devices. It encompasses an area of 1,800 square feet with a rating of Class 10,000. The cleanroom contains a variety of thin film manufacturing and diagnostic equipment, such as thin film evaporators, a diffusion furnace, photoresist spinner, mask aligners, wafer scribing and dicing equipment, and an ellipsometer. Additional equipment suitable for the manufacture and packaging of hybrid circuits is also available. Device characterization and testing equipment is also available and includes a computerized station with femto-Farad and pico-Amp resolution. Faculty, graduate, and undergraduate students use the facility in their research and education programs.

Contact Personnel:

• Adam Fontecchio 

Selected Research Posters:

• Compact stacking and wavefront analysis of electro-optic liquid crystal thin films for dynamic wavelength filtering applications
• Proof of concept radiometric generator